Blar i SINTEF Open på forfatter "Vahanissi, Ville"
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Atomic Layer Deposition of Titanium Oxide-Based Films for Semiconductor Applications—Effects of Precursor and Operating Conditions
Matkivskyi, Vladyslav; Leiviska, Oskari; Wenner, Sigurd; Liu, Hanchen; Vahanissi, Ville; Savin, Hele; Sabatino, Marisa Di; Tranell, Maria Gabriella (Peer reviewed; Journal article, 2023)Two widely used atomic layer deposition precursors, Tetrakis (dimethylamido) titanium (TDMA-Ti) and titanium tetrachloride (TiCl4), were investigated for use in the deposition of TiOx-based thin films as a passivating ...